By characterizing various materials and designs, it is shown that indeed OMOs may be made low noise and low power through maximization of the mechanical quality factor – a common quest for MEMs designers. With an emphasis on wafer-scale processes on silicon substrates, OMOs constructed from reflowed phosphosilicate glass, silicon nitride, and silicon were characterized and modeled. Due to non-linear light-matter interactions, OMOs are also known to produce RF frequency combs with an optical carrier. These combs were investigated and a method to produce a frequency comb spanning more than 6GHz from a 52MHz carrier was found. As a demonstration for how an OMO may be utilized in a chip-scale atomic clock, the 9th harmonic of a voltage-tunable device was phase-locked to a low noise microwave reference resulting in an 85dB reduction in phase noise at 1Hz offset from the carrier.