Details
Title
Plasma Immersion Ion Implantation (PIII) for Integrated Circuit Manufacturing: Third Quarterly Progress Report
Creator
Vahedi, V., Author
Lieberman, M.A., Author
Cheung, N.W., Author
Pico, C.A., Author
Stewart, R.A., Author
Tao, J., Author
Kiang, M.H., Author
Yu, C., Author
Troyanovsky, B., Author
En, W., Author
Jones, E., Author
Benasso, J., Author
Lieberman, M.A., Author
Cheung, N.W., Author
Pico, C.A., Author
Stewart, R.A., Author
Tao, J., Author
Kiang, M.H., Author
Yu, C., Author
Troyanovsky, B., Author
En, W., Author
Jones, E., Author
Benasso, J., Author
Published
June-September 1991
Full Collection Name
Electrical Engineering & Computer Sciences Technical Reports
Other Identifiers
ERL-91-86
Type
Text
Format
technical reports
Archive
The Engineering Library
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Collection