A macroscopic analytic model for a three-component electronegative plasma has been developed. Assuming the negative ions to be in Boltzmann equilibrium, a positive ion ambipolar diffusion equation is found. The electron density is nearly uniform, allowing a parabolic approximation to the plasma profile to be employed. The resulting equilibrium equations are solved analytically and matched to an electropositive edge plasma. The solutions are compared to a simulation of a parallel-plane r.f. driven oxygen plasma for two cases: (1) p=50 mTorr, neo = 2.4x10 (15) m-3, and (2) 10 mTorr, new = 1.0x10 (16) m-3. In the simulation, for the low power case (1), the ratio of negative ion to electron density was found to be alpha sub 0 is almost equal to 8, while in the higher power case alpha sub 0 is almost equal to 1.3. Using an electorn energy distribution that approximates the simulation distribution by a two-temperature Maxwellian, the analytic values of alpha sub zero are found to be close to, but somewhat larger, than the simulation values. The average electron temperature found self-consistently in the model is close to that in the simulation. The results indicate the need for determining a two-temperature electron distribution self-consistently within the model.




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