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The turning of a statistical process simulator, such as FABRICS II, requires the collection of considerable numbers of I-V (current voltage) characteristics of devices representing a technology. A fully automatic I-V measurement program has been developed on the HP 9836 Pascal Workstation to drive the HP 4062 Semiconductor Parametric Test System and the Electroglas 2001X Automatic Wafer Probing System. This program ca be used to probe single devices or entire wafers. This paper describes the system setup and the operation of the program, in both single device mode and automatic mode. A simple example and some measurement results are attached.

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