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The purpose of this project is to study the scaling effect on (radio frequency) RF micro electromechanical systems (MEMS) Switch. Many MEMS devices’ performance could be enhanced tremendously by scaling. This capstone report talks about the benefits and drawbacks of scaling. A detailed analysis on reliability will be introduced. Scaling effects on other parameters such as switching speed and actuation voltage will be discussed. This paper will point out a suggestion of how RF MEMS switch could be optimized and designed in the future.

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