The purpose of this project is to study the scaling effect on (radio frequency) RF micro electromechanical systems (MEMS) Switch. Many MEMS devices’ performance could be enhanced tremendously by scaling. This capstone report talks about the benefits and drawbacks of scaling. A detailed analysis on reliability will be introduced. Scaling effects on other parameters such as switching speed and actuation voltage will be discussed. This paper will point out a suggestion of how RF MEMS switch could be optimized and designed in the future.
Title
Scaling Effect on RF MEMS Switch
Published
EECS Department, University of California, University of California at Berkeley, Berkeley, California, December 16, 2018
Full Collection Name
Electrical Engineering & Computer Sciences Technical Reports
Other Identifiers
EECS-2018-186
Type
Text
Extent
19 p
Archive
The Engineering Library
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